Thermal Mass Flow Meter

Product Overview

A Thermal Mass Flowmeter measures the total mass flow rate of a fluid (primarily gases) flowing through a pipe or duct. It operates based on the principle of heat transfer from a heated sensor to the flowing fluid.

✅ Working Principle

• Fluid flows past a heated thermal sensor and a temperature sensor.

• As the fluid passes the heated sensor, heat is lost to the fluid, and the temperature difference is used to calculate the mass flow rate.

✅ Types of Thermal Mass Flowmeters

1. Thermal Dispersion / Immersible Type:

   • Measures total mass flow in closed conduits.

   • Widely used in industrial gas applications.

2. Capillary-Tube Type:

   • Often used in mass flow controllers (MFCs), combining a flow meter, electronics, and a valve.

3. MEMS-Based Thermal Mass Flowmeters:

   • Measures temperature differential across a silicon-based MEMS chip for high-precision gas flow measurement.

✅ Key Features

✔ Direct measurement of mass flow rate (no need for density or pressure correction).
✔ High accuracy for gas flow applications.
✔ Compact and versatile, suitable for integration with flow controllers.
✔ Can be used for continuous monitoring in industrial processes.

✅ Applications

• Industrial gas flow measurement

• Mass flow controllers (MFCs) in laboratory and process automation

• Environmental monitoring (air/gas flow)

• Semiconductor and microfluidics applications using MEMS technology

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